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Hye Eun Sim
Institution:
Myongji University
Observed institution:
Myongji University
ORCID:
0009-0001-3842-6352
Observed ORCID:
0009-0001-3842-6352
OpenAlex ID:
A5111189709
Part-Level Fault Classification of Mass Flow Controller Drift in Plasma Deposition Equipment
2024
·
Min Ho Kim
, Hye Eun Sim
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
·
5
Virtual Metrology of Multiple Dielectric Layer Thickness for 3D-NAND Deposition Process
2025
·
Hye Eun Sim
, Min Uk Lee
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
·
3
Data-driven monitoring of powder build-up for condition-based maintenance in semiconductor manufacturing facility
2024
·
Chanyoung Kim
, Hye Eun Sim
, et al.
·
Journal of Quality in Maintenance Engineering
·
2
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Works count:
3
Citation count:
10
H-index:
2
I10-index:
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