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Y. I. Sung
Institution:
Dankook University
Observed institution:
Dankook University
OpenAlex ID:
A5111348146
Chemiluminescence system for direct determination and mapping of ultra-trace metal impurities on a silicon wafer
2010
·
Romertta Kim
, Y. I. Sung
, et al.
·
The Analyst
·
12
Direct and simultaneous determination of Co and Cu on a silicon wafer using a chemiluminescence system
2011
·
Y. I. Sung
, J. W. Jang
, et al.
·
The Analyst
·
5
Analysis of Plating Solutions Used in the Microelectronic Manufacturing Process Employing Capillary Electrophoresis
2013
·
J. W. Chang
, Y. I. Sung
, et al.
·
IEEE Transactions on Semiconductor Manufacturing
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Works count:
3
Citation count:
17
H-index:
2
I10-index:
1
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