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Jiuru Gao
Institution:
Jiangsu Normal University
Observed institution:
Jiangsu Normal University
ORCID:
0009-0005-0513-9903
Observed ORCID:
0009-0005-0513-9903
OpenAlex ID:
A5113130410
Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods
2023
·
Chanjuan Liu
, Jiuru Gao
, et al.
·
Applied Thermal Engineering
·
16
Improving broad-beam ion etching equipment through innovative ion optics design
2023
·
Xingyu Li
, Lulu Guan
, et al.
·
Journal of Manufacturing Processes
·
7
Bottom angle control mechanism and optimization of slanted gratings for optical applications
2024
·
Jiuru Gao
, Chanjuan Liu
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
6
Investigating the mechanism of enhancing interfacial adhesion of SiOx films on GaAs substrates through process optimization
2024
·
Zhiwei He
, Jiuru Gao
, et al.
·
Thin Solid Films
·
3
Revealing the mechanism of interfacial adhesion enhancement between the SiO2 film and the GaAs substrate via plasma pre-treatments
2024
·
Zhiwei He
, Chanjuan Liu
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
3
Sidewall Kink Elimination of Slanted Gratings Utilizing a Twice-Etching Method
2024
·
Jiuru Gao
, Zhiwei He
, et al.
·
China Semiconductor Technology International Conference (CSTIC)
·
1
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Works count:
6
Citation count:
36
H-index:
3
I10-index:
1
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