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Gabriel Blankemeyer
Observed name:
Blankemeyer, Gabriel
Institution:
Tokyo Electron (Japan)
Observed institution:
Tokyo Electron (Japan)
ORCID:
0009-0008-1777-6784
Observed ORCID:
0009-0008-1777-6784
OpenAlex ID:
A5115549440
Plasma enhanced atomic layer deposition of silicon nitride and silicon carbonitride using a single source precursor and different plasmas
2025
·
Samuel M. Johnson
, Jianping Zhao
, et al.
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
1
(Invited) Engineering Semiconducting and Dielectric Materials and Processes Using Integrative Methods
2024
·
Peter Ventzek
, Jianping Zhao
, et al.
·
ECS Meeting Abstracts
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Works count:
4
Citation count:
1
H-index:
1
I10-index:
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