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Author

Chihiro Hamada

Institution: Horiba STEC (Japan)
Observed institution: Horiba STEC (Japan)
ORCID: 0009-0000-7329-3092
Observed ORCID: 0009-0000-7329-3092
OpenAlex ID: A5120655109
High speed response of liquid mass flow controller in direct liquid injection by observer-based control
2026 · Chihiro Hamada, Daisuke Hayashi, et al. · Mechatronics
Model-based liquid precursor supply in a baking vaporization module
2026 · Daisuke Hayashi, Kenta Tayama, et al. · Results in Engineering
Works count: 2
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