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Monica Mathur
Observed names:
Mathur, Monica,
Monica Sawkar Mathur
Institution:
Lam Research (United States)
Observed institution:
Lam Research (United States)
ORCID:
0009-0006-2329-5421
Observed ORCID:
0009-0006-2329-5421
OpenAlex ID:
A5125967548
Hydrogen bond-mediated activation of HF in SiO2 thermal dry etching: A first-principles study of catalytic additives
2026
·
Yihan Huang
, Monica Sawkar Mathur
·
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
·
1
Hydrogen bond-mediated activation of HF in SiO2 thermal dry etching: a first-principles study of catalytic additives
2026
·
Huang, Yihan
, Mathur, Monica
·
AIP Publishing
Supporting data and figures
2026
·
Huang, Yihan
, Mathur, Monica
·
AIP Publishing
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Works count:
3
Citation count:
1
H-index:
1
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