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Andy Shen
Institution:
Hubei Jiufengshan Laboratory
Observed institution:
Hubei Jiufengshan Laboratory
ORCID:
0009-0007-4607-3941
Observed ORCID:
0009-0007-4607-3941
OpenAlex ID:
A5127521537
Twist angle measurement of a SiC-SiC bonded wafer interface via electron diffraction
2026
·
Beitian Zheng
, Xu Chen
, et al.
·
Surfaces and Interfaces
·
1
Characterization of Twist and Tilt Misalignments in the Direct WaferBonding Process: A Case Study of LiNbO3 on Oxidized Si
2026
·
Beitian Zheng
, Xu Chen
, et al.
·
Langmuir
First demonstration of 8-in. N-polar GaN HEMT wafer via wafer bonding and layer transfer
2026
·
Chengguo Li
, Andy Shen
·
APL Materials
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Works count:
3
Citation count:
1
H-index:
1
I10-index:
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