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Egor V. Ivanov

Observed name: Ivanov, Egor V.
OpenAlex ID: A5129714658
Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator
2026 · Es'kin, Vasiliy A., Ivanov, Egor V. · arXiv (Cornell University) · 1
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Physics-Informed Neural Systems for the Simulation of EUV Electromagnetic Wave Diffraction from a Lithography Mask
2026 · Es'kin, Vasiliy A., Ivanov, Egor V. · arXiv (Cornell University) · 1
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A Two-Mirror Faceted Projection System for EUV Lithography
2026 · Es'kin, Vasiliy A., Ivanov, Egor V., et al. · arXiv (Cornell University)
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Works count: 3
Citation count: 2
H-index: 1
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