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S. Vollebregt
Institution:
Delft University of Technology
Observed institution:
Delft University of Technology
ORCID:
0000-0001-6012-6180
Observed ORCID:
0000-0001-6012-6180
OpenAlex ID:
A5129947607
Enhanced electron-beam lithography to reduce the frequency scatter of 200–400 GHz superconducting microstrip resonators for on-chip filterbank spectrometers
2026
·
L. G. G. Olde Scholtenhuis
, D. J. Thoen
, et al.
·
APL Engineering Physics
·
1
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