Author

Shinichi Iida

Observed names: Iida, Shinichi, 飯田慎一, 飯田, 慎一

OpenAlex ID: A5132267154

Mems デバイス作製に向けた微小電極によるパターン密度と電解めっき膜厚分布の関係評価

2026 · 栗岡, 智行, Kurioka, Tomoyuki, et al. · Institutional Repositories DataBase (IRDB)

エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討

2022 · 御宿, 希祐, Miyado, Kisuke, et al. · Institutional Repositories DataBase (IRDB)

Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討

2022 · 御宿, 希祐, Miyado, Kisuke, et al. · Institutional Repositories DataBase (IRDB)

Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure

2022 · 柴田, 滉平, Shibata, Kohei, et al. · Institutional Repositories DataBase (IRDB)

3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討

2021 · 大西, 哲, Onishi, Akira, et al. · Institutional Repositories DataBase (IRDB)

Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency

2021 · 渡邊瞳, Hitomi Watanabe, et al. · Institutional Repositories DataBase (IRDB)

A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer

2021 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討

2021 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

高分解能単一Au 錘CMOS-MEMS 加速度センサの検討

2020 · 柴田, 滉平, Shibata, Kohei, et al. · Institutional Repositories DataBase (IRDB)

Au錘一軸MEMS加速度センサの差動容量型電極構造の検討

2020 · 内山, 晃宏, Uchiyama, Akihiro, et al. · Institutional Repositories DataBase (IRDB)

100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討

2020 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討

2020 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

マイクロgレベルセンシングのための金錘1軸差動容量型mems加速度センサ

2020 · 内山, 晃宏, Uchiyama, Akihiro, et al. · Institutional Repositories DataBase (IRDB)

A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer

2020 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

2020 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers

2020 · 新田, 京太朗, Nitta, Kyotaro, et al. · Institutional Repositories DataBase (IRDB)

ピラー型電極を用いた単一錘3軸mems加速度センサの検討

2020 · 渥美, 賢, Atsumi, Ken, et al. · Institutional Repositories DataBase (IRDB)

A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing

2020 · 古賀, 達也, Koga, Sayaka, et al. · Institutional Repositories DataBase (IRDB)

ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討

2020 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

3Dピラー型Au錘MEMS加速度センサ

2019 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

積層メタル技術で作製したmems加速度センサの衝撃特性評価

2019 · 市川, 崇志, Itikawa, Takasi, et al. · Institutional Repositories DataBase (IRDB)

Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method

2019 · 新田, 京太朗, Nitta, Kyotaro, et al. · Institutional Repositories DataBase (IRDB)

Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability

2019 · 新田, 京太朗, Nitta, Kyotaro, et al. · Institutional Repositories DataBase (IRDB)

Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components

2019 · 新田, 京太朗, Nitta, Kyotaro, et al. · Institutional Repositories DataBase (IRDB)

Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers

2019 · 渡邊, 瞳, Watanabe, Hitomi, et al. · Institutional Repositories DataBase (IRDB)

Works count: 45

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