Author

Zhenjie Yao

Institutions: Chinese Academy of Sciences, Institute of Microelectronics, University of Chinese Academy of Sciences

Observed institutions: Chinese Academy of Sciences, Institute of Microelectronics, University of Chinese Academy of Sciences

ORCID: 0000-0003-1027-637X

Observed ORCID: 0000-0003-1027-637X

OpenAlex ID: A5134172913

Etch-ViGen: A Video Generation Model for Etching Simulation

2026 · Li Ding, Hua Shao, et al. · AI · 1

Lithography Test Layout Generation Using DRC-Constrained Large Language Models

2026 · Jinheng Sun, Tianshuai Qi, et al. · International Symposium of Electronics Design Automation (ISEDA)

Works count: 2

Citation count: 1

H-index: 1

I10-index: