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Boglárka Dikó
Observed names:
B Dikó,
Dikó, Boglárka
Institution:
Semilab (Hungary)
Observed institution:
Semilab (Hungary)
ORCID:
0009-0004-2768-2547
Observed ORCID:
0009-0004-2768-2547
OpenAlex ID:
A5134287499
Spatial convergence analysis on model-based optical critical dimension metrology of high-aspect ratio holes
2025
·
József Szenka
, Boglárka Dikó
, et al.
·
Optics Express
·
3
Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study
2024
·
Boglárka Dikó
, Roberta Zsófia Kiss
, et al.
·
Journal of Micro/Nanopatterning Materials and Metrology
·
1
PDF
Optical Critical Dimension Metrology for the SiC Trench MOSFET Process
2026
·
Boglárka Dikó
, Oleg Rusch
, et al.
·
Key engineering materials
Vapor sorption-based critical dimension metrology for uniaxial anisotropic nanopatterns
2026
·
Siefke, Thomas
, Fodor, Balint
, et al.
·
AIP Publishing
Supporting Information
2026
·
Füredi, Máté
, Marton, András
, et al.
·
AIP Publishing
Vapor sorption-based critical dimension metrology for uniaxial anisotropic nanopatterns
2026
·
Máté Füredi
, András Marton
, et al.
·
Applied Physics Letters
Optical Critical Dimension Metrology for the SiC Trench MOSFET Process
2026
·
Dikó, Boglárka
, Rusch, Oleg
, et al.
·
Fraunhofer-Publica (Fraunhofer-Gesellschaft)
Surface damage layer investigation of silicon carbide wafers by Mueller matrix spectroscopy
2025
·
B Dikó
, E Balogh
, et al.
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Works count:
10
Citation count:
4
H-index:
1
I10-index:
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