Author

Xinyuan Liu

Institution: Jiangsu University of Technology

Observed institution: Jiangsu University of Technology

ORCID: 0000-0002-7876-2297

Observed ORCIDs: 0000-0002-7876-2297, 0009-0002-3400-4010

OpenAlex ID: A5140181987

A High-Sensitivity Absolute-Pressure MEMS Capacitive Vacuum Sensor With a Bonding Technology-Based Silicon–Silicon–Glass Structure

2026 · Mahui Xu, Yongjian Feng, et al. · IEEE Sensors Journal

Influence of Element Composition on the Properties of New NbV Non-Evaporable Getter Films

2026 · Mahui Xu, Yongjian Feng, et al. · SSRN Electronic Journal

Influence of Element Composition on the Properties of New NbV Non-Evaporable Getter Films

2026 · Mahui Xu, Yongjian Feng, et al. · SSRN Electronic Journal

Works count: 3

Citation count:

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