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Microtechnology and MEMS

ISSNs: 1615-8326, 2365-0680
Source type: book series
Alternate names: Microtechnology and MicroElectroMechanical Systems (Print), Microtechnology and MicroElectroMechanical Systems (Internet)
Fully OA: No
DOAJ: No
OpenAlex ID: S4210170880
Mechanical Microsensors
2001 · Miko Elwenspoek, Remco Wiegerink · Microtechnology and MEMS · 315
Silicon Micromachining
2001 · Miko Elwenspoek, Remco Wiegerink · Microtechnology and MEMS · 263
Shape Memory Microactuators
2004 · Manfred Kohl · Microtechnology and MEMS · 240
Capillary Forces in Microassembly
2007 · Pierre Lambert · Microtechnology and MEMS · 89
Piezotronics and Piezo-Phototronics
2012 · Zhong Lin Wang · Microtechnology and MEMS · 88
Analyzing Mild- and Ultra-Mild Sliding Wear of Metallic Materials by Transmission Electron Microscopy
2018 · Alfons Fischer, Wlodzimierz Dudzinski, et al. · Microtechnology and MEMS · 66
Electromechanical Systems in Microtechnology and Mechatronics
2010 · Arno Lenk, Rüdiger G. Ballas, et al. · Microtechnology and MEMS · 65
CMOS Cantilever Sensor Systems
2002 · D. Lange, O. Brand, et al. · Microtechnology and MEMS · 59
Piezoceramic Sensors
2011 · Valeriy Sharapov · Microtechnology and MEMS · 50
Surface Tension in Microsystems
2013 · Pierre Lambert · Microtechnology and MEMS · 48
Advanced Analytical Methods in Tribology
2018 · Dienwiebel, Martin, De Barros Bouchet, Maria-Isabel · Microtechnology and MEMS · 33
Force Sensors for Microelectronic Packaging Applications
2005 · Schwizer, Jürg, Mayer, Michael, et al. · Microtechnology and MEMS · 33
CMOS Hotplate Chemical Microsensors
2007 · Graf, Markus, Hierlemann, Andreas, et al. · Microtechnology and MEMS · 32
Integrated Chemical Microsensor Systems in CMOS Technology
2005 · Hierlemann, Andreas, Liepmann, Dorian, et al. · Microtechnology and MEMS · 26
Micromachines as Tools for Nanotechnology
2003 · Microtechnology and MEMS · 26
Piezo-Electric Electro-Acoustic Transducers
2013 · Valeriy Sharapov, Zhanna Sotula, et al. · Microtechnology and MEMS · 25
Design and Manufacturing of Active Microsystems
2011 · Büttgenbach, Stephanus, Hesselbach, Jürgen, et al. · Microtechnology and MEMS · 25
Silicon Microchannel Heat Sinks
2004 · Lian Zhang, Kenneth E. Goodson, et al. · Microtechnology and MEMS · 24
Enhanced Nucleate Boiling in Microchannels
2004 · Lian Zhang, Kenneth E. Goodson, et al. · Microtechnology and MEMS · 19
Thermal Transport for Applications in Micro/Nanomachining
2008 · Basil T. Wong, M. Pinar Mengüç · Microtechnology and MEMS · 18
Piezotronics and Piezo-Phototronics
2023 · Zhong Lin Wang, Yan Zhang, et al. · Microtechnology and MEMS · 13
Capillary Forces in Atomic Force Microscopy and Liquid Nanodispensing
2013 · Thierry Ondarçuhu, Laure Fabié · Microtechnology and MEMS · 13
Tribochemistry and Morphology of P-Based Antiwear Films
2018 · A. Dorgham, A. Neville, et al. · Microtechnology and MEMS · 12
Semiconductors for Lasers
2004 · Hans Zappe · Microtechnology and MEMS · 10
Near Edge X-Ray Absorption Fine Structure Spectroscopy: A Powerful Tool for Investigating the Surface Structure and Chemistry of Solid Lubricants
2018 · Filippo Mangolini, J. Brandon McClimon · Microtechnology and MEMS · 9
Works count: 255
Citation count: 1,827
H-index: 19
I10-index: 24
2yr mean citedness:
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