Source

ASMC proceedings

ISSNs: 1078-8743, 2376-6697

Source type: conference

Alternate names: Proceedings, Advanced Semiconductor Manufacturing Conference and Workshop, 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295), 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings, 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072), 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530), 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Advanced Semiconductor Manufacturing Conference, Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC), Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Fully OA: No

DOAJ: No

OpenAlex ID: S4210195742

Deep reinforcement learning for semiconductor production scheduling

2018 · Bernd Waschneck, Andre Reichstaller, et al. · ASMC proceedings · 142

Anomaly detection through on-line isolation Forest: An application to plasma etching

2017 · Gian Antonio Susto, Alessandro Beghi, et al. · ASMC proceedings · 73

EtherCAT enabled advanced control architecture

2010 · Martin Rostan, Joseph E. Stubbs, et al. · ASMC proceedings · 70

Short-Interval Detailed Production Scheduling in 300mm Semiconductor Manufacturing using Mixed Integer and Constraint Programming

2006 · R. Bixby, R. Burda, et al. · ASMC proceedings · 67

Chemical-mechanical planarization

2003 · B. Roberts · ASMC proceedings · 66

A Deep Learning Model for Identification of Defect Patterns in Semiconductor Wafer Map

2019 · Yang Yuan-Fu · ASMC proceedings · 63

Self-directed work teams

1994 · R.A. Winter · ASMC proceedings · 56

CMOS transistor scaling past 32nm and implications on variation

2010 · Kelin J. Kuhn · ASMC proceedings · 55

A smart sampling algorithm to minimize risk dynamically

2010 · Stephane Dauzere-Peres, Jean-Loup Rouveyrol, et al. · ASMC proceedings · 54

Virtual metrology for plasma etch using tool variables

2009 · Shane Lynn, John Ringwood, et al. · ASMC proceedings · 52

The operating curve: a method to measure and benchmark manufacturing line productivity

2002 · S.S. Aurand, P.J. Miller · ASMC proceedings · 52

Overview of metrology requirements based on the 1994 National Technology Roadmap for semiconductors

2002 · A.C. Diebold · ASMC proceedings · 47

Simulation of emergent behavior in manufacturing systems

2002 · J. Spier, K. Kempf · ASMC proceedings · 44

Sub-0.25-micron interconnection scaling: damascene copper versus subtractive aluminum

2002 · A.K. Stamper, T.L. McDevitt, et al. · ASMC proceedings · 43

Screen printed flexible pressure sensors skin

2014 · Saleem Khan, L. Lorenzelli, et al. · ASMC proceedings · 37

Using discrete event simulation to analyze the impact of job priorities on cycle time in semiconductor manufacturing

2002 · D. Fronckowiak, A. Peikert, et al. · ASMC proceedings · 36

The nature and origin of chaos in manufacturing systems

2002 · T. Beaumariage, K. Kempf · ASMC proceedings · 36

Cycle time prediction in wafer fabrication line by applying data mining methods

2011 · Israel Tirkel · ASMC proceedings · 35

An overview of thermal management for next generation microelectronic devices

2003 · S.S. Tonapi, R.A. Fillion, et al. · ASMC proceedings · 35

Using static capacity modeling techniques in semiconductor manufacturing

2002 · J.D. Witte · ASMC proceedings · 35

Adaptive sampling methodology for in-line defect inspection

2005 · Ali Bousetta, Andrew J. Cross · ASMC proceedings · 34

Using GAN to Improve CNN Performance of Wafer Map Defect Type Classification : Yield Enhancement

2020 · YongSung Ji, Jee-Hyong Lee · ASMC proceedings · 32

Predictive Maintenance in semiconductor manufacturing

2015 · Jimmy Iskandar, James Moyne, et al. · ASMC proceedings · 31

Throughput time forecasting model

2002 · A. Raddon, B. Grigsby · ASMC proceedings · 31

Solving tough semiconductor manufacturing problems using data mining

2002 · R.M. Gardner, J. Bieker, et al. · ASMC proceedings · 31

Works count: 2,935

Citation count: 9,041

H-index: 29

I10-index: 212

2yr mean citedness: 0.616