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Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

Source type: conference
Alternate names: 2010 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Fully OA: No
DOAJ: No
OpenAlex ID: S4306497755
A Micromachined Vibrating Ring Gyroscope
1994 · M.W. Putty, K. Najafi · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 319
Squeeze-film damping in solid-state accelerometers
1990 · J.B. Starr · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 280
A comparison of muscle with artificial actuators
2003 · I.W. Hunter, S. Lafontaine · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 264
Thermo-magnetic metal flexure actuators
2003 · H. Guckel, J. Klein, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 212
Surface Micromachined Z-Axis Vibratory Rate Gyroscope
1996 · W.A. Clark, R. Horowitz, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 206
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Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry
2003 · Weijie Yun, R.T. Howe, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 172
A simple experimental technique for the measurement of the work of adhesion of microstructures
2003 · C.H. Mastrangelo, C.H. Hsu · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 164
A Flat High-Frequency Scanning Micromirror
2000 · R.A. Conant, J.T. Nee, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 159
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The effect of thermoelastic internal friction on the Q of micromachined silicon resonators
1990 · T.V. Roszhart · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 152
The effect of release-etch processing on surface microstructure stiction
2003 · R.L. Alley, G.J. Cuan, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 144
Silicon fusion bonding for pressure sensors
2003 · K. Petersen, P. Barth, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 128
A Methodical Approach to the Design of Compliant Micromechanisms
1994 · G.K. Ananthasuresh, S. Kota, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 125
Integrated uncooled infrared detector imaging arrays
2003 · R.A. Wood, C.J. Han, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 114
Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films
1990 · J.Y. Pan, P. Lin, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 113
Flexible Wireless Passive Pressure Sensors for Biomedical Applications
2006 · M.A. Fonseca, M.G. Allen, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 112
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Nanoelectromechanical Systems
2000 · M.L. Roukes · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 100
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A monolithic silicon accelerometer with integral air damping and overrange protection
2003 · P.W. Barth, F. Pourahmadi, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 95
Mechanical properties of fine grained polysilicon-the repeatability issue
2003 · H. Guckel, D.W. Burns, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 95
Electrically-activated, micromachined diaphragm valves
1990 · H. Jerman · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 84
Wide dynamic range direct accelerometer
1990 · W. Henrion, L. DiSanza, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 83
Friction and wear in microfabricated harmonic side-drive motors
1990 · M. Mehregany, S.D. Senturia, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 83
Continuous Micromixer with Pulsatile Micropumps
2000 · A.A. Deshmukh, D. Liepmann, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 76
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Deep X-ray and UV lithographies for micromechanics
1990 · H. Guckel, T.R. Christenson, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 74
Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings
2000 · L.G. Fréchette, S.A. Jacobson, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 70
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A pressure-balanced electrostatically-actuated microvalve
1990 · M.A. Huff, M.S. Mettner, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 70
Works count: 1,840
Citation count: 13,930
H-index: 46
I10-index: 371
2yr mean citedness: 0.512
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