Semiconductor materials and devices
Topics
Description: This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics ... more
Related topics (siblings) 3D IC and TSV technologies, Advanced Battery Materials and Technologies, Advanced battery technologies research, Advanced Data and IoT Technologies, Advanced DC-DC Converters +111 more
Subfield (parent): Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Works count: 162,500
Citations count: 2,202,000