Work

Effects of defect density on ultrathin graphene-based metal diffusion barriers

Year: 2015

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.4929833

Authors: Sooyeoun Oh, Younghun Jung, Jihyun Kim

Institution: Korea University

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Research Foundation of Korea

Award: G8197292393

OpenAlex ID: W1467477888

FWCI:

Cites: 34

Cited by: 6

Related to: 10