Electrostatically coupled micromechanical beam filters
Year: 2004
Type: conference-paper
Authors: S. Pourkamali, R. Abdolvand, G.K. Ho, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1484357306