Work

Electrical tuning of dielectric resonators with LIGA-MEMS

Year: 2013

Type: conference-paper

Source: European Microwave Integrated Circuit Conference

Authors: Christian Rusch, Martin Börner, Jürgen Mohr, Thomas Zwick, Yi Chen, Héctor J. De Los Santos

Institutions: Karlsruhe Institute of Technology, Christian-Albrechts-Universität zu Kiel, NanoMEMS Research (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1485657009

FWCI:

Cites: 14

Cited by: 2

Related to: 10