Work

High‐frequency Integrated Microelectromechanical Resonators and Filters

Year: 2004

Type: other

Source: Advanced micro & nanosystems

DOI: 10.1002/9783527616701.ch5

Author: F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1486750321

Cites: 24

Cited by: 5

Related to: 10