Work

An in-situ end-point detector for parylene CVD deposition

Year: 2003

Type: conference-paper

DOI: 10.1109/memsys.2003.1189820

Authors: Wongso Sutomo, Xuefeng Wang, D. Bullen, S.K. Braden, Chang Liu

Institutions: University of Illinois Urbana-Champaign, University of Illinois System

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1487827690

FWCI: 1.465

Cites: 7

Cited by: 1

Related to: 10