Work

Investigating thin film passivations for IGZO dual gate pH sensors fabricated at low temperature

Year: 2015

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2015.7181178

Authors: S. Pavlidis, P. Getz, J. Hagen, N. Kelley-Loughnane, B. Bayraktaroglu, O. Brand

Institutions: Georgia Institute of Technology, United States Air Force Research Laboratory, Wright-Patterson Air Force Base, U.S. Air Force Research Laboratory Sensors Directorate

Language: English

Topic: Analytical Chemistry and Sensors

Subfield: Bioengineering

Field: Chemical Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1493506383

FWCI: 2.871

Cites: 13

Cited by: 3

Related to: 10