Work

Mems & Microsystems Desingn And Manufacture

Year: 2002

Type: book

Source: McGraw-Hill Higher Education eBooks

Author: Tai–Ran Hsu

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1495423923

FWCI: 3.099

Cites:

Cited by: 128

Related to: 10