Work

A single-chip CMOS resonant beam gas sensor

Year: 2002

Type: conference-paper

Source: Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference

DOI: 10.1109/isscc.2001.912623

Authors: G. Hagleitner, D. Lange, O. Brand, A. Hierlemann, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1500211896

FWCI: 1.067

Cites: 1

Cited by: 4

Related to: 10