Work

Challenges in Patterning Mn12-acetate Thin Films by Electron-Beam Lithography

Year: 2006

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.2355105

Authors: K. Kim, A. Ford, V. Meenakshi, W. Teizer, H. Zhao, K. R. Dunbar

Institution: Texas A&M University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1506772699

FWCI: 0.53

Cites:

Cited by: 1

Related to: 10