Very high Q-factor in water achieved by monolithic, resonant cantilever sensor with fully integrated feedback
Year: 2004
Type: conference-paper
Institutions: ETH Zurich, IBM Research - Zurich, Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Office of Science
OpenAlex ID: W1512457382
