Work

Defect clustering and classification for semiconductor devices

Year: 2003

Type: conference-paper

Source: IEEE International Midwest Symposium on Circuits and Systems (MWSCAS)

DOI: 10.1109/mwscas.2002.1186923

Authors: B. Kundu, K.P. White, C. Mastrangelo

Institution: University of Virginia

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1522309300

FWCI: 0.732

Cites: 5

Cited by: 6

Related to: 10