CMOS-based sealed membranes for medical tactile sensor arrays
Year: 2003
Type: conference-paper
Authors: T. Salo, T. Vancura, O. Brand, H. Baltes
Institution: ETH Zurich
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Suomen Kulttuurirahasto
OpenAlex ID: W1526143517