Work

Universal concept for fabricating micron to millimeter sized 3-D parylene structures on rigid and flexible substrates

Year: 2003

Type: conference-paper

DOI: 10.1109/memsys.2003.1189819

Authors: Guo-Hua Feng, Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1528031841

FWCI: 1.73

Cites: 4

Cited by: 13

Related to: 10