A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage
Year: 2015
Type: article
Source: Sensors and Actuators A Physical
Authors: Xiaoyang Zhang, Can Duan, Lin Liu, Xingde Li, Huikai Xie
Institutions: University of Florida, Johns Hopkins University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W1528584926
