Work

Sputtering by Particle Bombardment III

Year: 1991

Type: book

Source: Topics in applied physics

DOI: 10.1007/3-540-53428-8

Authors: Hauffe, E, Hofer, W O, Wittmaack, Klaus, Behrisch, Rainer

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1535313585

FWCI: 21.69

Cites: 2

Cited by: 2,240

Related to: 10

Parts: 7