Work

Investigation of Amorphous Layer Formation Using Applied QUANTUM X Single Wafer And QUANTUM Batch Implanter

Year: 2006

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.2401469

Authors: Roisin Doherty, Brendan Mc Comb, Richard Ting, Yu Chin Cheng

Institutions: Applied Materials (United States), United Microelectronics (Taiwan)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: University of Florida

OpenAlex ID: W1536184451

FWCI:

Cites:

Cited by: 2

Related to: 10