Work

Reliability and contact resistance of polysilicon beam leads for use in a high-density connector

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2001.906479

Authors: S. Nikles, K. Najafi, R. Bradley, S. Bledsoe

Institution: University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: National Institutes of Health

OpenAlex ID: W1539361738

FWCI: 0.356

Cites: 9

Cited by: 1

Related to: 10