Work

Substrate-decoupled silicon disk resonators having degenerate gyroscopic modes with Q in excess of 1-million

Year: 2015

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2015.7180849

Authors: R. Mirjalili, H. Wen, D. E. Serrano, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1541128459

FWCI: 8.973

Cites: 12

Cited by: 30

Related to: 10