Year: 1998
Type: conference-paper
Abstract: A low power thermopneumatic MEMS valve utilizing several novel components has been developed.61 mW of power is sufficient to control a nitrogen flow of 1.1 1pm with an inlet pressure of 24 psi.Previous work [1,3] has shown that silicone rubber has a low Young's modulus(~!MPa) and exhibits good sealing properties.Thermopneumatic actuation [1,2] has the potential for large forces through long displacements.By using a "soft" membrane with a large gap, and thermopneumatic actuation, high flow rates are achievable while still keeping power consumption low.However, silicone has been shown to be permeable to a wide range of liquids including Fluorinert ™ which necessitates the addition of a barrier layer, in this case Parylene C.This paper presents a low power valve constructed with a composite silicone/Parylene membrane.a suspended heater for low heat loss through conduction, and a valve seat designed for improved sealing and particle resistance.
Authors: X. Yang, C. Grosjean, Y-C. Tai
Institution: California Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W1541815309