Work

Noncontact acoustic wave metrology of SOI substrates

Year: 2002

Type: conference-paper

Source: IEEE International SOI Conference (SOI)

DOI: 10.1109/soi.1998.723103

Authors: M. Banet, L.P. Allen, K.A. Nelson, M. Fuchs, J.A. Rogers, A. Akthukal, A. Maznev

Institutions: Harvard University, Massachusetts Institute of Technology

Language: English

Topic: Thermography and Photoacoustic Techniques

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1542517331

FWCI:

Cites: 3

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Related to: 10