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Spherical φ 1mm SAW device based on ball semiconductor/MEMS technology

Year: 2005

Type: conference-paper

Source: Proceedings/Proceedings - IEEE Ultrasonics Symposium

DOI: 10.1109/ultsym.2004.1417885

Authors: Dongyoun Sim, A. Mizukami, S. Akao, I. Satoh, M. Bryan, N. Takeda, T. Ohgi, N. Nakaso, T. Miyagishi, H. Tanaka, K. Fukiura, H. Kazato, H. Watanabe, T. Mihara, K. Yamanaka

Institutions: Tohoku University, Toppan (Japan), Azbil (Japan)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1553575935

FWCI:

Cites: 3

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Related to: 10