Work

On-chip 2-axis optical fiber actuator using gray-scale technology

Year: 2006

Type: conference-paper

Source: International Semiconductor Device Research Symposium

DOI: 10.1109/isdrs.2005.1595972

Authors: B. Morgan, R. Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1555034142

FWCI: 0.53

Cites: 4

Cited by: 1

Related to: 10