Work

Advanced Techniques in 3D Photolithography for MEMS

Year: 2006

Type: article

Source: Defense Technical Information Center (DTIC)

Authors: L. A. Mosher, Brian Morgan, Christopher M. Waits, Reza Ghodssi

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W155951168

FWCI:

Cites: 3

Cited by: 3

Related to: 20