Work

Introduction to Microfabrication

Year: 2010

Type: book

Source: Wiley eBooks

DOI: 10.1002/9781119990413

Author: Sami Franssila

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1562661071

FWCI: 18.67

Cites:

Cited by: 584

Related to: 10

Parts: 44