Work

Sputtering, Electron Bombardment, Oxide‐Chloride Conversion

Year: 1999

Type: other

Source: Inorganic reactions and methods

DOI: 10.1002/9780470145333.ch75

Author: Richard B. Fair

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1568824806

Cites: 1

Cited by:

Related to: 10