Work

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: II . Influence of Dopants

Year: 1990

Type: article

Source: Journal of The Electrochemical Society

DOI: 10.1149/1.2086278

Authors: H. Seidel, L. Csepregi, A. Heuberger, H. Baumgärtel

Institutions: Messerschmitt-Bölkow-Blohm (Germany), Fraunhofer-Gesellschaft, Freie Universität Berlin

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1568890842

FWCI: 5.147

Cites:

Cited by: 398

Related to: 10