Voltage-tunable piezoelectrically-transduced single-crystal silicon resonators on SOI substrate
Year: 2003
Type: conference-paper
Authors: G. Piazza, R. Abdolvand, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W1571158398