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Chemical vapor deposition of refractory metal reflectors for spectrally selective solar absorbers. Annual report, May 1, 1978-April 30, 1979

Year: 1979
Type: report
Abstract: Three methods are described to fabricate by chemical vapor deposition (CVD) molybdenum films which rival conventional mirror materials in their infrared reflectance. With an absolute reflectance of 97.4% at 10 ..mu..m, these Super Molybdenum films reflect better than any other molybdenum film previously reported. When deposited in the presence of oxygen, films of a reduced reflectance over the solar emission range result. If passivated and antireflected by a Si/sub 3/N/sub 4/ layer, such Black Molybdenum films are characterized by a solar absorptance value in excess of 90% and a thermal emittance value of 11% at 500/sup 0/C. No deterioration of these values has yet been observed in ongoing tests after 1000 hours exposure to 500/sup 0/C in a 1 Torr vacuum. Stacks containing Super Molybdenum as the reflector and amorphous silicon as the absorber have thus far survived 1000 hours in open air at 500/sup 0/C.
Language: English
Open Access status: green
Award: G754964215
OpenAlex ID: W1572640019
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Cited by: 1
Related to: 10