Work

A 3D-HARPSS Polysilicon Microhemispherical Shell Resonating Gyroscope: Design, Fabrication, and Characterization

Year: 2015

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2015.2431857

Authors: Peng Shao, Vahid Tavassoli, Curtis L. Mayberry, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Georgia Institute of Technology, Iowa State University

OpenAlex ID: W1573487348

FWCI: 2.733

Cites: 27

Cited by: 37

Related to: 10