Work

Large-area molded silicon nitride torsion mirrors

Year: 2003

Type: conference-paper

Source: IEEE/LEOS International Conference on Optical MEMS

DOI: 10.1109/omems.2002.1031436

Authors: D.L. Dickensheets, B.J. Lutzenberger, T.J. Kaiser, P.A. Himmer

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1576543202

FWCI:

Cites: 4

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Related to: 10