熱酸化Znイオン注入Si(001)上のZnOナノ粒子の成長挙動
Year: 2009
Type: article
Source: Acta Physica Sinica
Authors: Weijia Fu, Zhiwen Liu, Ming Liu, Mu Zong-Xin, Zhang Qing-Yu, Qingfeng Guan, Kangmin Chen
Language: Japanese
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W158213685