Work

Sandia programs relevant to microelectronics fabrication

Year: 1987

Type: report

Abstract: This report was prepared for the Semiconductor Industry and the National Laboratories Workshop held at the National Academy of Sciences, Washington, DC, February 24, 1987. It details the current Sandia program activities relevant to microelectronics fabrication.

DOI: 10.2172/6446238

Authors: S Picraux, F Vook, B Gregory

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: U.S. Department of Energy, Sandia National Laboratories

OpenAlex ID: W158381754

Cites:

Cited by:

Related to: 10