Controlling Dopant Diffusion and Activation through Surface Chemistry
Year: 2006
Type: conference-paper
Source: AIP conference proceedings
DOI: 10.1063/1.2401459
Institution: University of Illinois Urbana-Champaign
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1590549222